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Investigation of the thermal stability of ion-implanted and laser annealed silicon layers

✍ Scribed by S. A. Batishche; N. I. Danilovich; V. A. Mostovnikov; A. M. Pristrem; G. A. Tatur

Publisher
Springer US
Year
1987
Tongue
English
Weight
491 KB
Volume
46
Category
Article
ISSN
0021-9037

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