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Investigation of RuO2/Ta2O5 thin film evolution by thermogravimetry combined with mass spectrometry

✍ Scribed by János Kristóf; Tamás Szilágyi; Erzsébet Horváth; Ray L. Frost

Book ID: 108287837
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 151 KB
Volume: 485
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.03.037

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