Electrochemical and time-of-flight secondary ion mass spectrometry analysis of ultra-thin metal oxide (Al2O3 and Ta2O5) coatings deposited by atomic layer deposition on stainless steel

✍ Scribed by Belén Díaz; Jolanta Światowska; Vincent Maurice; Antoine Seyeux; Bernard Normand; Emma Härkönen; Mikko Ritala; Philippe Marcus

• Book ID: 113596178
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 673 KB
• Volume: 56
• Category: Article
• ISSN: 0013-4686
• DOI: 10.1016/j.electacta.2011.02.074