Ion Conductivity of Ta$_{2}$O$_{5}$ Solid Electrolyte Thin Film Prepared by Combination Sputtering with Radio Frequency Oxygen Plasma Irradiation

✍ Scribed by Noguchi, Daisuke; Taneda, Hiroshi; Higashimaru, Yukie; Kawano, Yoshihiko; Sei, Fumihiro

• Book ID: 120356337
• Publisher: Institute of Pure and Applied Physics
• Year: 2012
• Tongue: English
• Weight: 706 KB
• Volume: 51
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.51.025801