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Fabrication and Evaluation of Highly Oriented Ta 2 O 5 Piezoelectric Thin Films Prepared by Radio Frequency Magnetron Sputtering

✍ Scribed by Kakio, Shoji; Mitsui, Takeshi; Tsuchiya, Akinori; Nakagawa, Yasuhiko

Book ID: 120417705
Publisher: Institute of Pure and Applied Physics
Year: 2010
Tongue: English
Weight: 297 KB
Volume: 49
Category: Article
ISSN: 0021-4922
DOI: 10.1143/JJAP.49.07HB06

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