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Investigation on the formation of RuO2 film electrode by secondary ion mass spectrometry

✍ Scribed by J. Kristóf; S. Daolio; C. Piccirillo; B. Facchin; J. Mink


Book ID
116067679
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
549 KB
Volume
348
Category
Article
ISSN
0039-6028

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The formation of thermally prepared ZrO, thin films on nickel and titanium supports from a hydrated ZrOCI, precursor was followed as a function of the calcination temperature by secondary ion mass spectrometry. Concentration depth profiles of selected species (e.g. 0 -, CI-, ZrO;, C,H;) were used t