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Investigation of local order of a-SiN:H films deposited by hot wire chemical vapour deposition (HWCVD)

✍ Scribed by Bibhu P. Swain; Bhabani S. Swain; Nong M. Hwang

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 787 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.07.151

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