Structural evolution of a Ta-filament during hot-wire chemical vapour deposition of Silicon investigated by electron backscatter diffraction

✍ Scribed by Clive J. Oliphant; Christopher J. Arendse; Sara N. Prins; Gerald F. Malgas; Dirk Knoesen

• Publisher: Springer
• Year: 2011
• Tongue: English
• Weight: 977 KB
• Volume: 47
• Category: Article
• ISSN: 0022-2461
• DOI: 10.1007/s10853-011-6061-z