Introduction to Microelectromechanical Microwave Systems

✍ Scribed by Hector J. De Los Santos, Hector J. De Los Santos

• Publisher: Artech House Publishers
• Year: 2004
• Tongue: English
• Leaves: 235
• Edition: 2
• Category: Library

✦ Synopsis

Microelectromechanical microwave systems are the product of integrated circuit technology, mechanical engineering, materials science, and microwave communications. This completely updated, second edition of an Artech House bestseller brings together all the principles, techniques, methods, and theories from these different fields to provide you with a full, all-encompassing introduction to microelectromechanical microwave systems.

The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. It explains how RF MEMS can reduce overall systems size, weight, and cost and how to determine which applications can benefit most from RF MEMS technology. This practical book steers you past the drawbacks and towards the benefits of integrating RF/microwave MEMS into communications equipment. It also enables you to create devices and techniques that can improve the performance of communications circuits and systems.

✦ Table of Contents

Introduction to Microelectromechanical Microwave Systems......Page 1
Contents......Page 7
Preface xi......Page 11
Acknowledgments xxi......Page 12
1.1 MEMS Origins 1......Page 15
1.3 MEMS Fabrication Technologies 3......Page 17
1.3.1 Conventional IC Fabrication Process 4......Page 18
1.3.2 Bulk Micromachining 5......Page 19
1.3.3 Surface Micromachining 6......Page 20
1.3.4 Fusion Bonding 12......Page 26
1.3.6 Hybrid Micromachining Processes 14......Page 28
1.4 Exercises 18......Page 32
1.5 Summary 21......Page 35
References 21......Page 0
2.1 Actuation 25......Page 39
2.1.1 Electrostatic Actuation 26......Page 40
2.1.2 Piezoelectric Actuation 35......Page 49
2.1.3 Thermal Actuation 36......Page 50
2.1.4 Magnetic Actuation 39......Page 53
2.2 Mechanical Vibrations 40......Page 54
2.2.1 The Single-Degree-of-Freedom-System 41......Page 55
2.2.2 The Many-Degrees-of-Freedom System 42......Page 56
2.2.3 Rayleigh™s Method 43......Page 57
2.3 Computer-Aided Design of MEMS 46......Page 60
2.3.3 Numerical Simulation of MEMS 47......Page 61
2.4 Exercises 51......Page 65
2.5 Summary 53......Page 67
References 55......Page 69
3.2 The Cantilever Beam MEM Switch 59......Page 73
3.3.1 Switch Specifications 61......Page 75
3.3.2 Microwave Considerations 66......Page 80
3.3.3 Material Considerations 70......Page 84
3.3.4 Mechanical Considerations 76......Page 90
3.4 Summary 83......Page 97
References 84......Page 98
4.2 The Cantilever Beam MEM Resonator 87......Page 101
4.3.2 Microwave Considerations 89......Page 103
4.3.3 Micromechanical Resonator Limitations 106......Page 120
4.3.4 Film Bulk Acoustic Wave Resonators 110......Page 124
4.4 Exercises 115......Page 129
4.5 Summary 117......Page 131
References 118......Page 132
5.1 Introduction 121......Page 135
5.2.1 Coplanar Cantilever Beam MEM Switch
Performance Analysis 122......Page 136
5.2.2 Electrostatic Series Cantilever Beam
MEM Switch 123......Page 137
5.2.3 Electrostatic Shunt Cantilever Beam
MEM Switch 127......Page 141
5.2.4 Thermal-Electrostatic MEM Switch 132......Page 146
5.2.5 Magnetic MEM Switch 135......Page 149
5.3 Micromachining-Enhanced Planar Microwave
Passive Elements 138......Page 152
5.3.1 Micromachined Transmission Lines 140......Page 154
5.3.2 Micromachining-Enhanced Lumped Elements 152......Page 166
References 168......Page 182
6.1 Introduction 173......Page 187
6.2.1 Fundamentals of Wireless Communications 175......Page 189
6.2.2 Fundamentals of Satellite Communications 180......Page 194
6.3.1 Phase Shifters 183......Page 197
6.3.2 Resonators 184......Page 198
6.3.3 Filters 186......Page 200
6.3.4 Oscillators 199......Page 213
6.3.5 Packaging 202......Page 216
6.4 Summary 204......Page 218
References 205......Page 219
Glossary 209......Page 223
About the Author 211......Page 225
Index 213......Page 226