This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the rever
35.Microelectromechanical Systems
โ Scribed by John G. Webster (Editor)
- Publisher
- Wiley
- Year
- 1999
- Tongue
- English
- Leaves
- 30
- Series
- WILEY_ENCYCLOPEDIA_OF_ELECTRICAL_AND_ELECTRONICS_ENGINEERING
- Category
- Library
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the rever
The building blocks of MEMS design through closed-form solutionsMicroelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS
<p><P>This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.</P><P>Features of this work include:</P><UL><P><LI>An