Microelectromechanical Systems and Devices

✍ Scribed by N. Islam

• Publisher: Intech
• Year: 2012
• Tongue: English
• Leaves: 492
• Category: Library

✦ Table of Contents

00 preface_ Microelectromechanical Systems and Devices......Page 1
Part 1_ BioMEMS Devices......Page 13
01_ Implantable Parylene MEMS RF
Coil for Epiretinal Prostheses......Page 15
02_ MEMS-Based Microdevice for
Cell Lysis and DNA Extraction......Page 35
03_ MEMS Microfluidics for
Lab-on-a-Chip Applications......Page 51
04_ Acoustic Wave Based MEMS Devices,
Development and Applications......Page 77
Part 2_ MEMS Characterization and Micromachining......Page 99
05_ MEMS Characterization Based on
Optical Measuring Methods......Page 101
06_ Surface Characterization and Interfacial
Adhesion in MEMS Devices......Page 121
07_ Advanced Surfactant-Modified
Wet Anisotropic Etching......Page 143
08_ Macromodels of Micro-Electro-
Mechanical Systems (МEMS)......Page 167
Part 3_ RF and Optical MEMS......Page 203
09_ Dynamics of RF Micro-Mechanical
Capacitive Shunt Switches
in Coplanar Waveguide Configuration......Page 205
10_ Characterization and Modeling
of Charging Effects in Dielectrics
for the Actuation of RF MEMS Ohmic
Series and Capacitive Shunt Switches......Page 245
11_ Plasma Based Dry Release of MEMS Devices......Page 281
12_ Optical MEMS......Page 303
13_ Optical-Thermal Phenomena in Polycrystalline
Silicon MEMS During Laser Irradiation......Page 343
Part 4_ MEMS based Actuators......Page 361
14_ Piezoelectric Thick Films:
Preparation and Characterization......Page 363
15_ Possibilities for Flexible MEMS:
Take Display Systems as Examples......Page 381
16_ Thermal Microactuators......Page 427
17_ Standalone Tensile Testing of Thin Film
Materials for MEMS/NEMS Applications......Page 447
18_ Diamond, Diamond-Like Carbon (DLC) and
Diamond-Like Nanocomposite (DLN)
Thin Films for MEMS Applications......Page 471