Microelectromechanical Systems and Devices
β Scribed by Nazmul Islam
- Publisher
- InTech
- Year
- 2012
- Tongue
- English
- Leaves
- 492
- Category
- Library
No coin nor oath required. For personal study only.
β¦ Subjects
ΠΠ»Π΅ΠΊΡΡΠΎΠΌΠ΅Ρ Π°Π½ΠΈΡΠ΅ΡΠΊΠΈΠ΅ ΡΠΈΡΡΠ΅ΠΌΡ
π SIMILAR VOLUMES
Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and d
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the rever