Dynamics of Microelectromechanical Systems

✍ Scribed by Nicolae Lobontiu (auth.)

• Publisher: Springer US
• Year: 2007
• Tongue: English
• Leaves: 410
• Series: Microsystems 17
• Edition: 1
• Category: Library

✦ Synopsis

This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.

Features of this work include:

• An in-depth treatment of problems that involve reliable modeling, analysis and design,
• Analytical models with correct dependences on service dimensions,
• Cantilever based systems for nanofabrication researchers and designers, and
• Dynamics of complex spring and beam microsystems.

Although not designed for a specific course, this material could be used as a text at the upper-undergraduate/graduate level, and, as such, it contains numerous fully-solved examples as well as many end-of-the-chapter proposed problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained.

Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.

✦ Table of Contents

Front Matter....Pages i-x
Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies....Pages 1-137
Micromechanical Systems: Modal Analysis....Pages 139-228
Energy Losses in MEMS and Equivalent Viscous Damping....Pages 229-298
Frequency and Time Response of MEMS....Pages 299-393
Back Matter....Pages 395-402

✦ Subjects

Electronics and Microelectronics, Instrumentation; Nanotechnology; Circuits and Systems; Computer-Aided Engineering (CAD, CAE) and Design; Mechanical Engineering