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Mechanics of Microelectromechanical Systems

โœ Scribed by Lobontiu N., Garcia E.

Publisher
Kluwer Academic
Year
2005
Tongue
English
Leaves
419
Category
Library
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โœฆ Synopsis

This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy.

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<p><P>This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.</P><P>Features of this work include:</P><UL><P><LI>An