I have an interest in MEMS sensors and R&D efforts in such sensors, but little background in semiconductor processes. This book was a quick and painless introduction to the MEMS field from end to end. Complements and introduces the "handbooks" and their contents rather well.
An introduction to microelectromechanical systems engineering
โ Scribed by Nadim Maluf, Kirt Williams
- Publisher
- Artech House Publishers
- Year
- 2004
- Tongue
- English
- Leaves
- 304
- Edition
- 2
- Category
- Library
No coin nor oath required. For personal study only.
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