I have an interest in MEMS sensors and R&D efforts in such sensors, but little background in semiconductor processes. This book was a quick and painless introduction to the MEMS field from end to end. Complements and introduces the "handbooks" and their contents rather well.
An Introduction to Microelectromechanical Systems Engineering, Second Edition
โ Scribed by Nadim Maluf
- Year
- 2004
- Tongue
- English
- Leaves
- 306
- Edition
- 2
- Category
- Library
No coin nor oath required. For personal study only.
โฆ Synopsis
MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize industrial, optical, medical and electronic markets. Thousands of practitioners and students have gained a solid understanding of MEMS with the best-selling first edition of this book. Now in its second edition, An Introduction to Microelectromechanical Systems Engineering brings readers to up-to-date with the latest developments in this cutting-edge area. Featuring brand new coverage of today's hottest topics, such as RF MEMS and photonic MEMS, this thoroughly revised resource shows engineers, technical managers, and executives how their projects may benefit from a MEMS solution.
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