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Interstitial related defect of12B implanted into n- and p-type silicon

✍ Scribed by H. -P. Frank; T. Almeida; E. Diehl; K. -H. Ergezinger; B. Fischer; B. Ittermann; F. Mai; W. Seelinger; S. Weissenmayer; G. Welker; H. Ackermann; H. -J. Stöckmann

Book ID: 112373777
Publisher: Springer
Year: 1993
Tongue: English
Weight: 201 KB
Volume: 79
Category: Article
ISSN: 0304-3843
DOI: 10.1007/bf00567591

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