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Internal stresses in Cr, Mo, Ta, and Pt films deposited by sputtering from a planar magnetron source

✍ Scribed by Hoffman, D. W.

Book ID: 121775269
Publisher: AVS (American Vacuum Society)
Year: 1982
Weight: 874 KB
Volume: 20
Category: Article
ISSN: 0022-5355
DOI: 10.1116/1.571463

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