The influence of discharge current on the intrinsic stress in Mo films deposited using cylindrical and planar magnetron sputtering sources

✍ Scribed by Thornton, John A.

• Book ID: 125842922
• Publisher: AVS (American Vacuum Society)
• Year: 1985
• Tongue: English
• Weight: 578 KB
• Volume: 3
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.572997