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Internal stress and elastic modulus measurements on micromachined 3C-SiC thin films

✍ Scribed by Mehregany, M.; Lijun Tong; Matus, L.G.; Larkin, D.J.

Book ID: 114536673
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 187 KB
Volume: 44
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.554795

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