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Mechanical properties of thin films: Measurements of ultramicroindentation hardness, Young's modulus and internal stress

โœ Scribed by Y. Tsukamoto; H. Yamaguchi; M. Yanagisawa


Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
656 KB
Volume
154
Category
Article
ISSN
0040-6090

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