Examination of Bulge Test for Determining Residual Stress, Young’s Modulus, and Poisson’s Ratio of 3C-SiC Thin Films

✍ Scribed by Mitchell, Jay S.; Zorman, Christian A.; Kicher, Thomas; Roy, Shuvo; Mehregany, Mehran

• Book ID: 121206823
• Publisher: American Society of Civil Engineers
• Year: 2003
• Tongue: English
• Weight: 297 KB
• Volume: 16
• Category: Article
• ISSN: 0893-1321
• DOI: 10.1061/(ASCE)0893-1321(2003)16:2(46)