Young’s modulus, Poisson’s ratio, and residual stress and strain in (111)-oriented scandium nitride thin films on silicon

✍ Scribed by Moram, M. A. (author);Barber, Z. H. (author);Humphreys, C. J. (author);Joyce, T. B. (author);Chalker, P. R. (author)

• Book ID: 126775012
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 401 KB
• Volume: 100
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.2217106