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Interfacial transfer between copper and polyurethane in chemical-mechanical polishing

✍ Scribed by Hong Liang; Thierry Le Mogne; Jean-Michel Martin

Book ID: 107452848
Publisher: Springer US
Year: 2002
Tongue: English
Weight: 707 KB
Volume: 31
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-002-0198-0

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