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The interaction between different barrier metals and the copper surface during the chemical-mechanical polishing

✍ Scribed by D. Zeidler; Z. Stavreva; M. Plötner; K. Drescher

Book ID: 114155677
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 305 KB
Volume: 37-38
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(97)00117-2

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