✦ LIBER ✦
Correlation between process parameters and electrochemical surface state for electrochemical-mechanical polishing application of copper in acid- and alkali-based electrolyte
✍ Scribed by Youngkyun Lee; Yong-Jin Seo; Jun-Won Yang; Hyung-Ho Kim; Yeongbong Park; Haedo Jeong
- Book ID
- 107702338
- Publisher
- The Korean Institute of Metals and Materials
- Year
- 2012
- Tongue
- English
- Weight
- 872 KB
- Volume
- 8
- Category
- Article
- ISSN
- 1738-8090
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