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Synergistic roles of mixed inhibitors and the application of mixed complexing ligands in copper chemical mechanical polishing

✍ Scribed by Ning Wang; Guoshun Pan; Yan Liu

Book ID: 113797885
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 500 KB
Volume: 88
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2011.06.029

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