Surface Shape and Contact Pressure Evolution in Two Component Surfaces: Application to Copper Chemical Mechanical Polishing

✍ Scribed by W.G. Sawyer

• Book ID: 111613932
• Publisher: Springer US
• Year: 2004
• Tongue: English
• Weight: 820 KB
• Volume: 17
• Category: Article
• ISSN: 1023-8883
• DOI: 10.1023/b:tril.0000032438.56992.be