Interface properties of SiOxNylayer on Si prepared by atmospheric-pressure plasma oxidation-nitridation

✍ Scribed by Zhuo, Zeteng; Sannomiya, Yuta; Kanetani, Yuki; Yamada, Takahiro; Ohmi, Hiromasa; Kakiuchi, Hiroaki; Yasutake, Kiyoshi

• Book ID: 121619939
• Publisher: Springer-Verlag
• Year: 2013
• Tongue: English
• Weight: 481 KB
• Volume: 8
• Category: Article
• ISSN: 1931-7573
• DOI: 10.1186/1556-276X-8-201