A comparison of SiSiO2 interface trap properties in thin-film transistors with thermal and plasma nitrided oxides

✍ Scribed by Jean-Luc Autran; Carole Plossu; Frédéric Seigneur; Bernard Balland; Alain Straboni

• Book ID: 115990389
• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 346 KB
• Volume: 187
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/0022-3093(95)00167-0