Electrical Properties of Germanium Oxynitride and Its Interface with Germanium Prepared by Electron-Cyclotron-Resonance Plasma Oxidation and Nitridation

✍ Scribed by Fukuda, Yukio; Kato, Koji; Toyota, Hiroshi; Ono, Toshiro; Nagasato, Yoshitaka; Ueno, Tomo

• Book ID: 124067080
• Publisher: Institute of Pure and Applied Physics
• Year: 2006
• Tongue: English
• Weight: 180 KB
• Volume: 45
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.45.7351