The formation of grains in thin films generates intrinsic residual stress. In this work, we present a model of intrinsic residual stress calculation based on the size-dependent phase transitions of the nanograins. Evaporated thin films are produced by condensation from the vapor on the substrate. It
✦ LIBER ✦
Interface energy as an origin of intrinsic stress in thin films
✍ Scribed by Andrä, W. ;Danan, H.
- Publisher
- John Wiley and Sons
- Year
- 1982
- Tongue
- English
- Weight
- 182 KB
- Volume
- 70
- Category
- Article
- ISSN
- 0031-8965
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