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Interface and precipitation effects in solid phase epitaxy of Sb implanted amorphous Si

✍ Scribed by Campisano, S. U.; Gibson, J. M.; Poate, J. M.


Book ID
121501557
Publisher
American Institute of Physics
Year
1985
Tongue
English
Weight
367 KB
Volume
46
Category
Article
ISSN
0003-6951

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