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Amorphization and Solid-Phase Epitaxial Growth of C-Cluster Ion-Implanted Si

โœ Scribed by N.G. Rudawski; L.R. Whidden; V. Craciun; K.S. Jones


Book ID
107455572
Publisher
Springer US
Year
2009
Tongue
English
Weight
332 KB
Volume
38
Category
Article
ISSN
0361-5235

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