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Kinetic aspects of solid-phase epitaxial growth of amorphous Si

✍ Scribed by Z. L Liau; S.S. Lau; M-A. Nicolet; J.W. Mayer; R.J. Blattner; P. Williams; C.A. Evans Jr.

Publisher: Elsevier Science
Year: 1978
Weight: 455 KB
Volume: 149
Category: Article
ISSN: 0029-554X
DOI: 10.1016/0029-554x(78)90940-0

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