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Integrated optics based on silicon oxynitride thin films deposited on silicon substrates for sensor applications

✍ Scribed by D. Peters; K. Fischer; J. Müller

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
540 KB
Volume
26
Category
Article
ISSN
0924-4247

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## Abstract In this paper, effective dielectric constant, line attenuation, and characteristic impedance of thin film microstrip line (TFML) on polyimide dielectric as interconnection for radio frequency integrated circuits is investigated. The TFML is fabricated on low cost low resistivity silicon