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Formation of low pressure chemically vapour deposited W thin film on silicon dioxide for gate electrode application

โœ Scribed by Jae Hyun Sone; Sun-Oo Kim; Ki-Joan Kim; Hyoung Sub Kim; Hyeong Joon Kim


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
422 KB
Volume
253
Category
Article
ISSN
0040-6090

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