Both a pH-sensitive thin-film sensor and a thick-film reference electrode have been integrated into a hybrid sensor module that is suitable for (bio-)chemical analysis in aqueous solutions. The pH-sensitive thin-film sensor consists of a capacitive layer structure of Al/p-Si/SiO 2 /Al 2 O 3 and is p
Silicon-on-Insulator Based Thin-Film Resistor for Chemical and Biological Sensor Applications
โ Scribed by Michael G. Nikolaides; Stephan Rauschenbach; Sebastian Luber; Karin Buchholz; Marc Tornow; Gerhard Abstreiter; Andreas R. Bausch
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 82 KB
- Volume
- 4
- Category
- Article
- ISSN
- 1439-4235
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