Evaluation of a Chip-Based Thin-Film / Thick-Film Sensor Hybrid for (Bio-)Chemical Analysis
✍ Scribed by Michael J. Schöning; Anette Simonis; Thomas Krings; Hans Lüth; Joseph Wang
- Publisher
- John Wiley and Sons
- Year
- 2002
- Tongue
- English
- Weight
- 424 KB
- Volume
- 14
- Category
- Article
- ISSN
- 1040-0397
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✦ Synopsis
Both a pH-sensitive thin-film sensor and a thick-film reference electrode have been integrated into a hybrid sensor module that is suitable for (bio-)chemical analysis in aqueous solutions. The pH-sensitive thin-film sensor consists of a capacitive layer structure of Al/p-Si/SiO 2 /Al 2 O 3 and is prepared by semiconductor-compatible process steps. The thick-film reference electrode of p-Si/Ag/AgCl is printed by conventional screen-printed technique onto the same silicon substrate. Such combination of the thin-film sensor and the thick-film reference allows the realization of a miniaturized sensor hybrid without an external macroscopic reference electrode. Due to its set-up, the sensor hybrid shows a response characteristic to both H -and Cl À -ions and can be employed in well-defined analytes, like for biomedical applications. The utility of the new thin-film / thick-film sensor hybrid is demonstrated for the determination of the H -and Cl À -ion concentration in aqueous solutions.