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Inhibition of pyramid formation in the etching of Si p(100) in aqueous potassium hydroxide-isopropanol

✍ Scribed by Campbell, S A; Cooper, K; Dixon, L; Earwaker, R; Port, S N; Schiffrin, D J

Book ID: 121188176
Publisher: Institute of Physics
Year: 1995
Tongue: English
Weight: 892 KB
Volume: 5
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/5/3/002

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