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Spectroscopic investigations of the stability of porous silicon structure obtained by etching Si(100) in aqueous ammonium fluoride solution

✍ Scribed by E. O. Filatova; K. M. Lysenkov; A. A. Sokolov; A. A. Ovchinnikov; D. E. Marchenko; V. M. Kashkarov; I. V. Nazarikov

Book ID: 111450612
Publisher: SP MAIK Nauka/Interperiodica
Year: 2010
Tongue: English
Weight: 130 KB
Volume: 36
Category: Article
ISSN: 1063-7850
DOI: 10.1134/s1063785010020082

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Etching processing of Si(111) and Si(100) surfaces in an ammonium fluoride solution investigated by in situ ATR-IR

✍ Masanori Nakamura; Moon-Bong Song; Masatoki Ito 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 512 KB

situ real-time measurements of etching processes by infrared total reflection spectroscopy were carried out for the first time on Si(ll1) and Si(100) surfaces in ammonium fluoride solution. The absorption bands became broad by the interaction between terminal hydrides with water molecules. On Si(lll