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Kinetic isotopic effects in the anisotropic etching of p-Si〈100〉 in alkaline solutions

✍ Scribed by Theo Baum; David J. Schiffrin


Book ID
108344072
Publisher
Elsevier
Year
1997
Tongue
English
Weight
926 KB
Volume
436
Category
Article
ISSN
1572-6657

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