✦ LIBER ✦

Morphology of hydrogen-terminated Si(111) and Si(100) surfaces upon etching in HF and buffered-HF solutions

✍ Scribed by P. Dumas; Y.J. Chabal; P. Jakob

Book ID: 118365724
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 1011 KB
Volume: 269-270
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(92)91363-g

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Infrared spectroscopy of Si(111) and Si(

Infrared spectroscopy of Si(111) and Si(100) surfaces after HF treatment: Hydrogen termination and surface morphology

✍ Chabal, Y. J. 📂 Article 📅 1989 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 746 KB

Kinetic model of the chemical etching of

Kinetic model of the chemical etching of Si(111) surfaces by buffered HF solutions

✍ P. Jakob; Y.J. Chabal; Krishnan Raghavachari; R.S. Becker; A.J. Becker 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 737 KB

Infrared spectroscopy of Si(111) surface

Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology

✍ Burrows, V. A.; Chabal, Y. J.; Higashi, G. S.; Raghavachari, K.; Christman, S. B 📂 Article 📅 1988 🏛 American Institute of Physics 🌐 English ⚖ 687 KB

Electron-energy-loss characterization of

Electron-energy-loss characterization of the H-terminated Si(111) and Si(100) surfaces obtained by etching in NH4F

✍ P. Dumas; Y.J. Chabal 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 626 KB

Analyses of HF/NH4F buffer-treated Si(11

Analyses of HF/NH4F buffer-treated Si(111) surfaces using XPS, REM and SIMS

✍ Y. Ma,J. A. Eades 📂 Article 📅 1996 🏛 Springer 🌐 English ⚖ 701 KB

Etching processing of Si(111) and Si(100

Etching processing of Si(111) and Si(100) surfaces in an ammonium fluoride solution investigated by in situ ATR-IR

✍ Masanori Nakamura; Moon-Bong Song; Masatoki Ito 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 512 KB

situ real-time measurements of etching processes by infrared total reflection spectroscopy were carried out for the first time on Si(ll1) and Si(100) surfaces in ammonium fluoride solution. The absorption bands became broad by the interaction between terminal hydrides with water molecules. On Si(lll