InGaN/GaN light-emitting diodes with ITO p-contact layers prepared by RF sputtering
β Scribed by Chang, C S; Chang, S J; Su, Y K; Lin, Y C; Hsu, Y P; Shei, S C; Chen, S C; Liu, C H; Liaw, U H
- Book ID
- 125513955
- Publisher
- Institute of Physics
- Year
- 2003
- Tongue
- English
- Weight
- 107 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0268-1242
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## Abstract Indiumβtinβoxide (ITO) deposited by conventional capacitive RF magnetron sputtering (rf MS), DC facing target sputtering (dc FTS) and two postannealed samples of these were compared. Comparison of the ITOs aimed at investigating the surface and microstructure effect on the electrical an