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Influence on the transport properties of the deposition temperature of a-Si:H films deposited from mixtures of silane in helium at high deposition rates

✍ Scribed by J.P. Kleider; C. Longeaud; P. Roca i Cabarrocas

Book ID
115989027
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
310 KB
Volume
164-166
Category
Article
ISSN
0022-3093

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The in uence of the thickness of the a-Si : H ΓΏlm on its optical properties was studied using spectrophotometric measurements of the ΓΏlm transmittance and re ectance in the wavelength range 200 -3000 nm. Both the refractive index and the absorption coe cient were found to increase as the ΓΏlm thickne