Influence of thickness on the optical properties of vacuum-deposited a-Si:H films

✍ Scribed by A.M. El-Naggar

• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 110 KB
• Volume: 33
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/s0030-3992(01)00031-7

✦ Synopsis

The in uence of the thickness of the a-Si : H ÿlm on its optical properties was studied using spectrophotometric measurements of the ÿlm transmittance and re ectance in the wavelength range 200 -3000 nm. Both the refractive index and the absorption coe cient were found to increase as the ÿlm thickness increased and the absorption edge shifted to lower energies. Both the optical energy gap, Eg, and Urbach parameter values, E0, decreased with increasing thickness. This decrease in Eg and E0 was slow for thicknesses above 400 nm.