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Effect of thickness on the structure, morphology and optical properties of sputter deposited Nb2O5 films

โœ Scribed by Fachun Lai; Limei Lin; Zhigao Huang; Rongquan Gai; Yan Qu

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
375 KB
Volume
253
Category
Article
ISSN
0169-4332

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Thickness-dependent structural and optic
Thickness-dependent structural and optical properties of sputter deposited ZrO2 films
โœ Sha Zhao; Fei Ma; Zhongxiao Song; Kewei Xu ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 255 KB

ZrO 2 thin films in thickness of 17 nm to 559 nm were deposited on Si-(1 0 0) and glass substrates using mid-frequency reactive magnetron sputtering method. The microstructure analysis showed that the stable monoclinic phase preferentially grew in the initial growth stage, whereas the relative amoun