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Structure and optical properties of vacuum-deposited scandium films on crystalline substrates

โœ Scribed by S. Mahmoud; Z. S. El Mandolah


Publisher
Springer
Year
1987
Tongue
English
Weight
390 KB
Volume
22
Category
Article
ISSN
0022-2461

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Amorphous carbon nitride thin films were deposited on polymer substrates using radio frequency (rf) plasma in a mixture of nitrogen (N 2 ) and acetylene (C 2 H 2 ) gasses. The samples were prepared at different rf plasma power (350, 400, 450, 500, and 550 W), at constant plasma exposure time of 10 m