✦ LIBER ✦

Ion bombardment effect on the growth of a-Si:H films deposited from a pure silane plasma

✍ Scribed by B. Drevillon; J. Huc; N. Boussarssar

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Influence of ion bombardment on a-Si: H

✍ Isamu Kato; Toshiyuki Yoneda; Toru Matsushita 📂 Article 📅 1995 🏛 John Wiley and Sons 🌐 English ⚖ 566 KB

Silane plasma parameters and their depen

✍ Xi Zhonghe; Yang Fan; Xu Feng; Zhang Guanghuai; Lin Hongyi; Hu Jianfang 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 125 KB

Effect of ion bombardment during plasma

✍ T. Sasaki; Y. Ichikawa 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 295 KB

Deposition of nanocrystalline silicon fi

✍ M. Scheib; B. Schröder; H. Oechsner 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 296 KB

Ion and radical reactions in the silane

✍ G. Turban; Y. Catherine; B. Grolleau 📂 Article 📅 1982 🏛 Springer 🌐 English ⚖ 844 KB

Effect of ion-bombardment on the deposit

✍ Mutsukura, Nobuki; Daigo, Yoshiaki 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 144 KB