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Influence of thermal annealing on the ultraviolet stability of a-SiC:H thin films deposited from liquid organosilanes

โœ Scribed by J Seekamp; W Bauhofer

Book ID
117148821
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
128 KB
Volume
227-230
Category
Article
ISSN
0022-3093

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Optimization of the electrical properties of Al/a-SiC:H Schottky diodes by means of thermal annealing of a-SiC:H thin films
โœ L. Magafas; J. Kalomiros; D. Bandekas; G. Tsirigotis ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 169 KB

The present work reports on the optimization of the electrical properties of Al/a-SiC:H Schottky diodes by means of thermal annealing of a-SiC:H thin films. Optical transmission experiments have shown that the optical properties of the films are affected by thermal annealing when T a 4600 1C, due to